Product Description:
- Wafer cassette has become an indispensable tool in the semiconductor industry due to its superior protective performance, anti-static characteristics, and good compatibility.
- A wafer cassette is a device specifically designed for storing and transporting semiconductor wafers, widely used in semiconductor manufacturing, testing, and packaging processes.
Features:
As semiconductor fabrication technology has advanced to produce more sophisticated devices, wafer cassette design has kept pace. Semiconductor fabrication now involves higher automation levels, greater tool uptime and throughput, higher process temperatures, additional mask layers, and compound semiconductor materials. In response, wafer carriers have been designed to have better thermal capabilities, protection from electrostatic discharge, reduced outgassing at high temperatures, and improved dimensional stability and particulation.
Wafer cassettes are designed to suit a wide variety of applications and may possess the following qualities:
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- Capability to hold from one to multiple wafers, commonly up to 25 for transport or storage.
- Open side wall configuration to allow easy access for wafer handling.
- Locating track notches at the center of the cassette, as well as pins and holes on the top rail for reliable operation with automated material handling systems and process tools.
- End wall configurations having a handle or flanges for material handling systems.
| Material | Degree of temperature resistance | Property | Application |
| PFA Cassette | 200~220℃ | Strong acid, strong hydrofluoric acid, strong base resistant | For acid& base process |
| PP Cassette | 40~60℃ | Pros: Light weight, able to welding
Cons: Distort easily |
For general transfer process
|
| PC Cassette | 80~100℃ | Light weight, able to welding |
| PEI Cassette | 130~150℃ | Wear resistant, anti-static |
Why Choose US:
- High quality materials: Our products are made of high-quality, chemically resistant materials to ensure effective protection of wafers during transportation and storage, extending their service life.
- User-friendly design: Ergonomic design makes operation more convenient, reduces operator fatigue, and improves work efficiency.
- Excellent sealing performance: Adopting an efficient sealing design to prevent external pollution, ensure a clean internal environment, and protect the wafer from being affected.
- High quality materials: Our products are made of high-quality, chemically resistant materials to ensure effective protection of wafers during transportation and storage, extending their service life.
